Method for forming carbon nanotubes with post-treatment step

ABSTRACT

Carbon nanotubes are formed on a surface of a substrate using a plasma chemical deposition process. After the nanotubes have been grown, a post-treatment step is performed on the newly formed nanotube structures. The post-treatment removes graphite and other carbon particles from the walls of the grown nanotubes and controls the thickness of the nanotube layer. The post-treatment is performed with the plasma at the same substrate temperature. For the post-treatment, the hydrogen containing gas is used as a plasma source gas. During the transition from the nanotube growth step to the post-treatment step, the pressure in the plasma process chamber is stabilized with the aforementioned purifying gas without shutting off the plasma in the chamber. This eliminates the need to purge and evacuate the plasma process chamber.

CROSS REFERENCE TO RELATED APPLICATIONS

[0001] The following U.S. patent applications are owned by the owner of the present application and their disclosure is incorporated herein by reference in its entirety:

[0002] Ser. No. ______ by Simon Kang, et al. filed on the same date and titled, as originally filed, “METHOD FOR FORMING CARBON NANOTUBES” which application has subsequently issued as U.S. patent ______, issued on ______).

[0003] Ser. No. ______ by Simon Kang, et al. filed on ______ and titled, as originally filed, “PATTERNED GRANULIZED CATALYST LAYER SUITABLE FOR ELECTRON-EMITTING DEVICE, AND ASSOCIATED FABRICATION METHOD” which application has subsequently issued as U.S. patent ______, issued on ______).

FIELD OF THE INVENTION

[0004] The present invention generally relates to method for forming carbon nanotubes, and more specifically to forming purified carbon nanotubes from which graphitic and carbon particles are removed using a purification process.

DESCRIPTION OF THE RELATED ART

[0005] The carbon has four crystalline states which include diamond, graphite, fullerene and carbon nanotubes. The carbon nanotubes exhibit a number of remarkable electrical and mechanical properties, which make them very desirable for use in modern electronic devices, such as cathode-ray tubes (CRT).

[0006] The carbon nanotubes were originally created by means of an electric arc discharge between two graphite rods. However, this technique for forming nanotubes is not efficient and requires a complicated post-treatment or purification procedure.

[0007] The carbon nanotubes can be also grown on a substrate using a plasma chemical vapor deposition, as described, for example, in U.S. Pat. No. 6,331,209B1, the entire disclosure of which is incorporated herein by reference. Specifically, according to the disclosed method, which will be referred to herein as a conventional method for obtaining nanotubes, carbon nanotubes are grown on a substrate using a plasma chemical vapor deposition method at a high plasma density. The conventional carbon nanotube formation technique includes: growing a carbon nanotube layer on a substrate to have a predetermined thickness by plasma deposition; purifying the carbon nanotube layer by plasma etching; and repeating the growth and the purification of the carbon nanotube layer. For the plasma etching, a halogen-containing gas, for example, a carbon tetrafluoride gas is used as a source gas.

[0008] It should be noted that according to the conventional method for growing carbon nanotubes, after each nanotube growth step and before the nanotube putification step, the plasma in the process chamber has to be turned off and the process chamber has to be purged and evacuated. Subsequently, the pressure of the purifying gas needs to be stabilized and the plasma needs to be turned back on. The aforementioned multiple steps which need to be completed after the nanotubes have been grown and before they are purified make the conventional process for forming carbon nanotubes unduly expensive and time consuming.

[0009] Accordingly, what is needed is a technique for forming carbon nanotubes utilizing a fewer number of process steps.

SUMMARY OF THE INVENTION

[0010] The present invention is directed to methods and systems that substantially obviate one or more of the above and other problems associated with the conventional technique for forming carbon nanotubes. Consistent with exemplary embodiments of the present invention, there are provided methods for forming carbon nanotubes.

[0011] According to the inventive concept, a plurality of carbon nanotubes are formed on a substrate. The nanotubes are first grown on the substrate by plasma chemical deposition; and then purified by post-treating of the grown carbon nanotubes by plasma etching. The substrate may be composed of a glass, a ceramic, a wafer, a crystal, or a metal alloy.

[0012] Further improvements include coating of the substrate surface with a catalytic material. In addition, a buffer layer may be provided between the substrate and the catalytic layer. During the growing, a hydrocarbon gas may be used as a source gas for the plasma chemical deposition and hydrocarbon-containing gas may be used as an additive gas for enhancing the purification. On the other hand, during the post-treatment, a hydrogen-containing gas which is similar to the additive gas during the growing of the carbon nanotubes can be used as a source gas for the plasma continously.

[0013] A density of plasma source which is utilized to perform the plasma chemical deposition and purification may be a in the ranges of 10¹⁰ to 10¹²/cm³.

[0014] Additional aspects related to the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Aspects of the invention may be realized and attained by means of the elements and combinations particularly pointed out in the appended claims.

[0015] It is to be understood that both the foregoing and the following descriptions are exemplary and explanatory only and are not intended to limit the claimed invention in any manner whatsoever.

BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which are incorporated in and constitute a part of this specification exemplify the embodiments of the present invention and, together with the description, serve to explain and illustrate principles of the inventive technique. Specifically:

[0017]FIG. 1 illustrates a cross-sectional view of an exemplary embodiment of a substrate for use in the formation of carbon nanotubes according to the inventive concept;

[0018]FIG. 2 illustrates a cross-sectional view of an exemplary embodiment of a substrate during the growth stage of the inventive carbon nanotubes formation process;

[0019]FIG. 3 illustrates a cross-sectional view of an exemplary embodiment of a substrate during the post-treatment stage of the inventive carbon nanotubes formation process; and

[0020]FIG. 4 illustrates a cross-sectional view of an exemplary embodiment of a substrate with carbon nanotube layer formed in accordance with the inventive process.

DETAILED DESCRIPTION

[0021] In the following detailed description, reference will be made to the accompanying drawings, in which identical functional elements are designated with like numerals. The aforementioned accompanying drawings show by way of illustration, and not by way of limitation, specific implementations consistent with principles of the present invention. These implementations are described in sufficient detail to enable those skilled in the art to practice the invention and it is to be understood that other implementations may be utilized and that structural changes may be made without departing from the scope and spirit of present invention. The following detailed description is, therefore, not to be construed in a limited sense.

[0022] According to the inventive concept, carbon nanotubes are formed on a surface of a substrate using a plasma chemical deposition process. The material of the substrate can be chosen to provide for desired mechanical and electrical properties, such as conductivity and rigidity. In one embodiment of the invention, the substrate can be made of an electrically insulating material, such as a glass, quartz or ceramic plate. In an alternative embodiment of the substrate can be made of a metal alloy. Persons of skill in the art would undoubtedly appreciate that the choice of the substrate material is not essential to the concept of the present invention.

[0023] Reference will now be made to FIG. 1, which illustrates a cross-sectional view of an exemplary embodiment 100 of a substrate for use in the formation of carbon nanotubes according to the inventive concept. To facilitate the formation of the carbon nanotubes thereon, the upper surface of the substrate 101 can be coated with a catalytic metal layer 103 of a predetermined thickness, as shown in FIG. 1. For example, this catalytic layer 103 may comprise one of the transition group metals, including, without limitation, nickel, cobalt and iron. Alternatively, the catalytic material 103 can comprise an alloy of one or more such metals. Various methods for coating substrate with catalytic layers of predetermined thickness are well known to persons of skill in the art. One such widely used method is a sputtering deposition process. The thickness of the catalytic layer 103 may vary in the range between 1 nm and 100 nm.

[0024] In an alternative embodiment of the invention an additional buffer 102 layer may be disposed between the substrate and the catalytic layer 103. The buffer layer 102 prevents the diffusion between the catalytic layer 103 and the substrate 101. In one embodiment of the invention, the buffer layer 102 may be formed of a metal. In one embodiment, the buffer layer 102 metal may be molybdenum. In an alternative embodiment, the buffer layer 102 may be of a titanium or titanium tungsten. In yet another embodiment, the buffer layer 102 may be of a titanium or titanium tungsten or titanium nitride.. The substrate having the aforementioned catalytic and optional buffer layers 103 and 102, respectively, is placed into a plasma process chamber, where the nanotube layer growth is performed.

[0025]FIG. 2 illustrates a cross-sectional view of an exemplary embodiment 200 of a substrate during the growth stage of the inventive carbon nanotubes formation process. In that figure, numeral 202 designates deposition plasma produced by a plasma source, while numeral 201 designates the newly grown nanotube layer. To facilitate the growth process, the substrate 100 and the ambient gas in the plasma process chamber may be heated to a temperature in the range between 400 C. and 600 C. In one embodiment of the invention, a capacitively coupled plasma chamber capable of generating a high-density plasma is used in the nanotube growing process. The source gas for the plasma deposition 202 may be a hydrocarbon containing gas. In an alternative embodiment of the present invention, the plasma source may be an inductively coupled plasma device. In one embodiment of the present invention, the plasma density to grow the carbon nanotubes is in the range of 10¹⁰ to 10¹²/cm³.

[0026] In one embodiment of the present invention, the plasma source gas for growing the carbon nanotubes may be one of CH₄ and C₂H₂ gases. The temperature range of the substrate during the growing of the carbon nanotubes ranges between 400 C. to 600 C. and the plasma gas pressure ranges between 500 to 5000 mTorr. Carbon nanotube layer is grown in the plasma process chamber to a predetermined thickness. It should be noted that the aforementioned nanotube layer thickness is not linear with the time of growth.

[0027] After the nanotubes have been grown in the described manner, the post-treatment step is performed on the newly formed nanotube structures. Specifically, the post-treatment removes graphite and other carbon particles from the walls of the grown nanotubes and controls the diameter of the carbon nanotubes. FIG. 3 illustrates a cross-sectional view of an exemplary embodiment 300 of a substrate during the post-treatment stage of the inventive carbon nanotubes formation process. In that figure, numeral 301 designates post-treatment plasma produced by a plasma source. In one embodiment of the invention, the post-treatment is performed with the plasma 301 at the same substrate temperature. For the post treatment the hydrogen containing gas may be used as plasma source.

[0028] In one embodiment the hydrogen containing gas may be H₂, NH₃ or a mixture of H₂ and NH₃. During the transition from the nanotube growth step to the post-treatment step, the pressure in the plasma process chamber is stabilized with the aforementioned purifying gas without shutting off the plasma in the chamber. This eliminates the need to purge and evacuate the plasma process chamber. After the post-treatment, the pressure in the chamber may be again stabilized with the nanotube growing gas and the nanotube growth may be repeated. FIG. 4 illustrates a cross-sectional view of an exemplary embodiment 400 of a substrate with carbon nanotube layer 201 grown and purified in accordance with the inventive process.

[0029] It should be also noted that to facilitate the growth of nanotubes the catalyst layer may be optionally treated and granularized into nano size particles. This step is performed before the nanotubes are grown. In the granulation phase, the substrate is exposed to a granulation gas which causes patterning of the catalyst layer into nano particles. In this phase, the catalyst layer is granularised into multiple round shapes and randomly spread over the buffer layer. Having round shaped nano particles enhances the density of carbon nanotube formed on each catalyst particle.

[0030] In one embodiment of the present invention, the granule size of the catalyst particles may range from 1 nm to 200 nm. In one embodiment, the granule density may be in the range of 10⁸ cm² to 10¹¹ cm². In one embodiment of the present invention, during granulation phase, the reaction surface of the catalyst layer is increased to a three dimensional surface through the round shape catalyst particles. The three dimensional surface of the catalyst particles enhances the growing of the carbon nanotubes. The three dimensional surface of the catalyst particles also helps in the diffusion of the carbon nanotubes to the catalyst layer. This helps reduce the temperature at which the carbon nanotubes may be formed. After the granulation phase the plasma chamber is purged with nitrogen (N₂) gas or argon (Ar) gas and evacuated. In one embodiment of the present invention, Helium (He) may be used to purge the plasma chamber. The substrate is then placed in the chamber and heated to a temperature of about 400 C. to 600 C.

[0031] In one embodiment of the present invention a negative voltage bias is applied to the substrate to improve the vertical growth of the carbon nanotubes. In one embodiment of the negative voltage bias is between 50 and 600 volts. The angle of growing the carbon nanotubes to the nominal axis of the substrate is also at an angle lower than 45 degrees. After the carbon nanotubes are grown, the granular particles of the catalyst layer may be removed.

[0032] It should be understood that processes and techniques described herein are not inherently related to any particular apparatus and may be implemented by any suitable combination of components. Further, various types of general purpose devices may be used in accordance with the teachings described herein. It may also prove advantageous to construct specialized apparatus to perform the method steps described herein.

[0033] The present invention has been described in relation to particular examples, which are intended in all respects to be illustrative rather than restrictive. Those skilled in the art will appreciate that many different combinations of hardware, software, and firmware will be suitable for practicing the present invention.

[0034] Moreover, other implementations of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims. 

1-22. (Canceled).
 23. A method for forming carbon nanotubes in a chamber, the method comprising: growing a plurality of carbon nanotubes by chemical vapor deposition using a plasma; and without shutting off the plasma after the carbon nanotubes are grown, post-treating the grown carbon nanotubes by etching using the plasma.
 24. The method of claim 23, wherein growing the carbon nanotubes comprises: introducing a source gas into the chamber; and growing the carbon nanotubes from carbon in the source gas.
 25. The method of claim 24, wherein the source gas comprises a hydrocarbon gas.
 26. The method of claim 25, wherein the hydrocarbon gas is CH₄.
 27. The method of claim 25, wherein the hydrocarbon gas is C₂H₂.
 28. The method of claim 23, wherein post-treating the carbon nanotubes comprises: introducing a purification gas into the chamber; and purifying the grown carbon nanotubes using the purification gas.
 29. The method of claim 28, wherein the purification gas comprises a hydrogen-containing gas.
 30. The method of claim 29, wherein the hydrogen-containing gas is NH₃.
 31. The method of claim 29, wherein the hydrogen-containing gas is H₂.
 32. The method of claim 29, wherein the hydrogen-containing gas is a mixture of H₂ and NH₃.
 33. The method of claim 24, wherein post-treating the carbon nanotubes comprises: introducing a purification gas into the chamber, the purification gas added as an additive to the source gas for growing the carbon nanotubes; and purifying the grown carbon nanotubes using the purification gas.
 34. The method of claim 23, wherein the carbon nanotubes are grown on a substrate at a temperature between 400° C. and 600° C.
 35. The method of claim 23, wherein the carbon nanotubes are grown at a pressure between 500 mTorr and 5000 mTorr.
 36. The method of claim 23, wherein the plasma has a density between 10¹⁰ and 10¹²/cm³.
 37. The method of claim 23, wherein the plasma is provided by a microwave plasma source.
 38. The method of claim 23, wherein the plasma is provided by an inductively coupled plasma source.
 39. The method of claim 23, wherein the plasma is provided by a capacitively coupled plasma source.
 40. A method for forming carbon nanotubes, the method comprising: a step for growing carbon nanotubes in a chamber by chemical deposition using a plasma; and a step for post-treating the grown carbon nanotubes by plasma etching after the carbon nanotubes are grown, without shutting off the plasma or evacuating the chamber.
 41. The method of claim 40, wherein the step for growing uses a hydrocarbon gas.
 42. The method of claim 40, wherein the step for growing uses a hydrocarbon gas selected from a group consisting of: CH₄ and C₂H₂.
 43. The method of claim 40, wherein the step for post-treating uses a hydrogen-containing gas.
 44. The method of claim 40, wherein the step for post-treating uses a hydrogen-containing gas selected from a group consisting of: NH₃ and H₂.
 45. An electron emissive device comprising a plurality of carbon nanotubes formed on a substrate by the method of any one of the preceding claims. 